Apparatus for aligning a surface of an active retainer ring...

Carrier having pistons for distributing a pressing force on...

Carrier head for a chemical mechanical polishing apparatus

Carrier head for a chemical mechanical polishing apparatus

Carrier head for chemical mechanical polishing

Carrier head with a compressible film

Carrier head with a flexible membrane for chemical...

Carrier head with a modified flexible membrane

Carrier head with edge load retaining ring

Carrier head with local pressure control for a chemical mechanic

Carrier head with pressure transfer mechanism

Carrier head with retaining ring and carrier ring

Chemical mechanical polishing head having floating wafer...

Clamp for connecting/disconnecting a rotary head to/from a...

CMP head

Conformal disk holder for CMP pad conditioner

Curved surface cutting processing method

Determining when to replace a retaining ring used in...

Dust scattering prevention device in floor polisher

Elastic foamed sheet and wafer-polishing jig using the sheet