Air flotation and locking material handling apparatus and...

Apparatus and method for mounting a wafer in a polishing...

Apparatus for holding substrate to be polished

Bearing assembly for wafer planarization carrier

Bench for machining elongate objects such as strips of marble an

Carrier head design for a chemical mechanical polishing apparatu

Carrier head having location optimized vacuum holes

Carrier head with multi-part flexible membrane

CMP equipment for use in planarizing a semiconductor wafer

Device for carrying thin wafers and method of carrying the...

Device for fixing and maintaining shapeable glass plates in posi

Fixture for grinding machines

Flexible dressable edge support

Holder for flat subjects in particular semiconductor wafers

Pedestal of a load-cup which supports wafers loaded/unloaded...

Pedestal of a load-cup which supports wafers loaded/unloaded...

Polishing apparatus

Polishing head of a chemical mechanical polishing apparatus...

Rotary union for coupling fluids in a wafer polishing apparatus

Semiconductor wafer carrier stage for chemical mechanical polish