Pedestal of a load-cup which supports wafers loaded/unloaded...

Details Pedestal of a load-cup which supports wafers loaded/unloaded... Pedestal of a load-cup which supports wafers loaded/unloaded...

2005-03-01

2005-03-01

Nguyen, George (Department: 3723)

Abrading

Work holder

Vacuum

C451S388000, C451S285000, C451S444000

Reexamination Certificate

active

06860801

ABSTRACT:
A pedestal of a load-cup for supporting wafers loaded onto and being unloaded from a chemical mechanical polishing (CMP) apparatus includes a pedestal plate, and a pedestal film which extends over only a limited area at the upper surface of the pedestal plate. This area includes the regions directly around the fluid ports provided in the pedestal plate for vacuum-chucking the wafers and spraying deionized water. The pedestal plate may have a cross-shaped part, the entirety of which bears the fluid ports. The pedestal film may include annular members each extending around only a respective one of the fluid ports, or one or more members each extending radially around several of the fluid ports. By offering a rather limited contact area to the wafer supported on the pedestal, the pedestal film reduces the amount of contaminants which could be transferred to the wafer surface in contact therewith.

REFERENCES:
patent: 5324012 (1994-06-01), Aoyama et al.
patent: 5374829 (1994-12-01), Sakamoto et al.
patent: 5738574 (1998-04-01), Tolles et al.
patent: 5772773 (1998-06-01), Wytman
patent: 5934984 (1999-08-01), Togawa et al.
patent: 6193807 (2001-02-01), Tateyama et al.
patent: 6227950 (2001-05-01), Hempel et al.
patent: 6241592 (2001-06-01), Togawa et al.
patent: 6257564 (2001-07-01), Avneri et al.
patent: 6368049 (2002-04-01), Osaka et al.
patent: 63-229732 (1988-09-01), None
patent: 2-26246 (1990-02-01), None

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