Abrading – Work holder – Vacuum
Patent
1995-10-27
1997-10-28
Eley, Timothy V.
Abrading
Work holder
Vacuum
451288, 451289, 451398, B24B 502, B24B 2902
Patent
active
056812159
ABSTRACT:
A carrier uses multiple bellows to form two pressure chambers between the housing and carrier base and retaining ring assembly. By pressurizing the first chamber, an even load can be applied across the substrate. By pressurizing the second chamber, the retaining ring can pressed against the polishing pad. The bellows allow the carrier base to pivot with respect to the housing, but the downward force is evenly applied to the substrate through the first pressure chamber. Torque is transferred from the carrier housing to the carrier base through the bellows.
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Lee Harry Q.
Shendon Norm
Sherwood Michael T.
Spektor Semyon
Applied Materials Inc.
Eley Timothy V.
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