4. Abrading
  5. Work holder
  6. Vacuum
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Carrier head design for a chemical mechanical polishing apparatu

Abrading – Work holder – Vacuum
Patent

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Carrier head having location optimized vacuum holes

Abrading – Work holder – Vacuum
Reexamination Certificate

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Carrier head with multi-part flexible membrane

Abrading – Work holder – Vacuum
Reexamination Certificate

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CMP equipment for use in planarizing a semiconductor wafer

Abrading – Work holder – Vacuum
Reexamination Certificate

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