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Plasma treatment and repair processes for reducing sidewall...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Plasma treatment apparatus and method

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Plasma treatment apparatus and method for plasma treatment

Semiconductor device manufacturing: process – Radiation or energy treatment modifying properties of...
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Plasma treatment apparatus and method for plasma treatment

Semiconductor device manufacturing: process – Radiation or energy treatment modifying properties of...
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Plasma treatment apparatus and method for plasma treatment

Semiconductor device manufacturing: process – Radiation or energy treatment modifying properties of...
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Plasma treatment apparatus and plasma treatment method

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Plasma treatment at film layer to reduce sheet resistance...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Plasma treatment between deposition processes

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Responsive to electromagnetic radiation
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Plasma treatment for copper oxide reduction

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Plasma treatment for copper oxide reduction

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Plasma treatment for ex-situ contact fill

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Plasma treatment for silicon-based dielectrics

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Plasma treatment for surface of semiconductor device

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Plasma treatment method

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Plasma treatment method and plasma treatment apparatus

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Plasma treatment method and plasma treatment device

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Ion implantation of dopant into semiconductor region
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Plasma treatment method and system

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Plasma treatment method for electromigration reduction

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Plasma treatment method for fabricating microelectronic...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Plasma treatment method for PECVD silicon nitride films for impr

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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