Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Responsive to electromagnetic radiation
Reexamination Certificate
2008-10-31
2010-06-22
Fourson, George (Department: 2823)
Semiconductor device manufacturing: process
Making device or circuit responsive to nonelectrical signal
Responsive to electromagnetic radiation
C438S063000, C438S096000, C438S482000, C257SE31045, C257SE31048, C257SE27125, C257SE25007, C136S250000
Reexamination Certificate
active
07741144
ABSTRACT:
Embodiments of the present invention include an improved method of forming a thin film solar cell device using a plasma processing treatment between two or more deposition steps. Embodiments of the invention also generally provide a method and apparatus for forming the same. The present invention may be used to advantage to form other single junction, tandem junction, or multi-junction solar cell devices.
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Chae Yong-Kee
Choi Soo Young
Li Liwei
Sheng Shuran
Applied Materials Inc.
Fourson George
Patterson & Sheridan LLP
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