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Protection of tungsten alignment mark for FeRAM processing

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Having substrate registration feature
Reexamination Certificate

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Protection structures for the suppression of plasma damage

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Patent

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Protective coating for electrolytic capacitors

Semiconductor device manufacturing: process – Making passive device – Stacked capacitor
Reexamination Certificate

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Protective coating for planarization

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
Reexamination Certificate

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Protective coating for planarization

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
Reexamination Certificate

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Protective film for the fabrication of direct build-up...

Semiconductor device manufacturing: process – Packaging or treatment of packaged semiconductor – Encapsulating
Reexamination Certificate

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Protective hardmask for producing interconnect structures

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Protective layer during scribing

Semiconductor device manufacturing: process – Semiconductor substrate dicing
Reexamination Certificate

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Protective layer having compression stress on titanium layer...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Protective layer in memory device and method therefor

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Protective layers for MRAM devices

Semiconductor device manufacturing: process – Having magnetic or ferroelectric component
Reexamination Certificate

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Protective layers prior to alternating layer deposition

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Protective layers prior to alternating layer deposition

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Protective liner for isolation trench side walls and method

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
Patent

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Protective oxide buffer layer for ARC removal

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
Reexamination Certificate

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Protective self-aligned buffer layers for damascene...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Protective self-aligned buffer layers for damascene...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Protective self-aligned buffer layers for damascene...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Protective side wall passivation for VCSEL chips

Semiconductor device manufacturing: process – Making device or circuit emissive of nonelectrical signal – Substrate dicing
Reexamination Certificate

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Protective tape applying and separating methods

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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