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Assessing plasma induced gate dielectric degradation with stress

Semiconductor device manufacturing: process – With measuring or testing
Patent

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Atomic force microscopy and signal acquisition via buried...

Semiconductor device manufacturing: process – With measuring or testing
Reexamination Certificate

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ATR-FTIR metal surface cleanliness monitoring

Semiconductor device manufacturing: process – With measuring or testing
Reexamination Certificate

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Automated method of controlling critical dimensions of...

Semiconductor device manufacturing: process – With measuring or testing – Electrical characteristic sensed
Reexamination Certificate

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Automated method of controlling photoresist develop time to...

Semiconductor device manufacturing: process – With measuring or testing
Reexamination Certificate

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Automated sourcing of substrate microfabrication defects...

Semiconductor device manufacturing: process – With measuring or testing – Optical characteristic sensed
Reexamination Certificate

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Automated variation of stepper exposure dose based upon...

Semiconductor device manufacturing: process – With measuring or testing
Reexamination Certificate

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Automated variation of stepper exposure dose based upon...

Semiconductor device manufacturing: process – With measuring or testing
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Automating photolithography in the fabrication of integrated cir

Semiconductor device manufacturing: process – With measuring or testing
Patent

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Automating photolithography in the fabrication of integrated...

Semiconductor device manufacturing: process – With measuring or testing
Reissue Patent

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