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Unlanded process in semiconductor manufacture

Semiconductor device manufacturing: process – With measuring or testing – Electrical characteristic sensed
Reexamination Certificate

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Use of slurry waste composition to determine the amount of...

Semiconductor device manufacturing: process – With measuring or testing
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Using a submicron level dimension reference

Semiconductor device manufacturing: process – With measuring or testing
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Using a superlattice to determine the temperature of a semicondu

Semiconductor device manufacturing: process – With measuring or testing
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Using a time invariant statistical process variable of a...

Semiconductor device manufacturing: process – With measuring or testing
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Using fast hot-carrier aging method for measuring plasma...

Semiconductor device manufacturing: process – With measuring or testing – Electrical characteristic sensed
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Using scatterometry to detect and control undercut for ARC...

Semiconductor device manufacturing: process – With measuring or testing
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Using scatterometry to measure resist thickness and control...

Semiconductor device manufacturing: process – With measuring or testing
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Using scatterometry to measure resist thickness and control...

Semiconductor device manufacturing: process – With measuring or testing
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Using scatterometry to verify contact hole opening during...

Semiconductor device manufacturing: process – With measuring or testing – Optical characteristic sensed
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Using UV/VIS spectrophotometry to regulate developer...

Semiconductor device manufacturing: process – With measuring or testing
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Utilizing electrical performance data to predict CD...

Semiconductor device manufacturing: process – With measuring or testing
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