ATR-FTIR metal surface cleanliness monitoring

Semiconductor device manufacturing: process – With measuring or testing

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C438S016000, C356S237200, C356S369000

Reexamination Certificate

active

06908773

ABSTRACT:
Attenuated total reflectance (ATR)-Fourier transform infrared (FTIR) metal surface cleanliness monitoring is disclosed. A metal surface of a semiconductor die is impinged with an infrared (IR) beam, such as can be accomplished by using an ATR technique. The IR beam as reflected by the metal surface is measured. For instance, an interferogram of the reflected IR beam may be measured. A Fourier transform of the interferogram may also be performed, in accordance with an FTIR technique. To determine whether the metal surface is contaminated, the IR beam as reflected is compared to a reference sample. For example, the Fourier transform of the interferogram may be compared to the reference sample. If there is deviation by more than a threshold, the metal surface may be concluded as being contaminated.

REFERENCES:
patent: 5160826 (1992-11-01), Cohen et al.
patent: 5905269 (1999-05-01), Venkataramani et al.
patent: 6141100 (2000-10-01), Burka et al.
patent: 6433877 (2002-08-01), Watanabe et al.
patent: 6774368 (2004-08-01), Busch et al.
patent: 6784428 (2004-08-01), Rabolt et al.
patent: 2002/0180991 (2002-12-01), Takoudis et al.
patent: 2004/0113077 (2004-06-01), Franzen et al.
patent: 2004/0195511 (2004-10-01), Elmore et al.
UK Patent Application (0013800) Watanabe et al. (Apr. 10, 2000).

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

ATR-FTIR metal surface cleanliness monitoring does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with ATR-FTIR metal surface cleanliness monitoring, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and ATR-FTIR metal surface cleanliness monitoring will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-3516778

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.