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Apparatus and method for detecting defects on silicon dies on a

Semiconductor device manufacturing: process – With measuring or testing
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Apparatus and method for detecting soft breakdown of a...

Semiconductor device manufacturing: process – With measuring or testing – Electrical characteristic sensed
Reexamination Certificate

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Apparatus and method for determining doping concentration of...

Semiconductor device manufacturing: process – With measuring or testing – Electrical characteristic sensed
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Apparatus and method for determining porosity

Semiconductor device manufacturing: process – With measuring or testing – Optical characteristic sensed
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Apparatus and method for enhanced voltage contrast analysis

Semiconductor device manufacturing: process – With measuring or testing – Electrical characteristic sensed
Reexamination Certificate

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Apparatus and method for fabricating arrays of atomic-scale...

Semiconductor device manufacturing: process – With measuring or testing – Electrical characteristic sensed
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Apparatus and method for measuring wafer clamping tension

Semiconductor device manufacturing: process – With measuring or testing
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APPARATUS AND METHOD FOR OPTICAL EVALUATION, APPARATUS AND...

Semiconductor device manufacturing: process – With measuring or testing – Optical characteristic sensed
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APPARATUS AND METHOD FOR OPTICAL EVALUATION, APPARATUS AND...

Semiconductor device manufacturing: process – With measuring or testing
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Apparatus and method for preparing backside-ground wafers...

Semiconductor device manufacturing: process – With measuring or testing
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Apparatus and method for providing a signal port in a...

Semiconductor device manufacturing: process – With measuring or testing – Optical characteristic sensed
Reexamination Certificate

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Apparatus and method for testing a flip chip integrated circuit

Semiconductor device manufacturing: process – With measuring or testing – Packaging or treatment of packaged semiconductor
Patent

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Apparatus and method for testing defects

Semiconductor device manufacturing: process – With measuring or testing – Electrical characteristic sensed
Reexamination Certificate

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Apparatus and method for testing defects

Semiconductor device manufacturing: process – With measuring or testing – Electrical characteristic sensed
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Apparatus and method for testing fuses

Semiconductor device manufacturing: process – With measuring or testing
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Apparatus and method for testing semiconductor devices

Semiconductor device manufacturing: process – With measuring or testing
Reexamination Certificate

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Apparatus and method to inspect defect of semiconductor device

Semiconductor device manufacturing: process – With measuring or testing
Reexamination Certificate

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Apparatus and methods for determining overlay and uses of same

Semiconductor device manufacturing: process – With measuring or testing – Optical characteristic sensed
Reexamination Certificate

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Apparatus and methods for determining overlay of structures...

Semiconductor device manufacturing: process – With measuring or testing – Optical characteristic sensed
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Apparatus and methods for monitoring self-aligned contact...

Semiconductor device manufacturing: process – With measuring or testing – Electrical characteristic sensed
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