Plasma deposited fluorinated amorphous carbon films

Plasma deposition method and system

Plasma enhanced atomic layer deposition (PEALD) equipment...

Plasma enhanced chemical vapor deposition method of forming...

Plasma enhanced liner

Plasma enhanced method for increasing silicon-containing...

Plasma enhanced nitride layer

Plasma etch chemistry and method of improving etch control

Plasma etch method with enhanced endpoint detection

Plasma etch process and TiSi.sub.x layers made using the process

Plasma etch process for multilayer vias having an organic...

Plasma induced depletion of fluorine from surfaces of...

Plasma oxidation method and method for manufacturing...

Plasma process enhancement through reduction of gaseous...

Plasma process for organic residue removal from copper

Plasma processing method and plasma processing apparatus

Plasma processing method and plasma processing apparatus

Plasma treated thermal CVD of TaN films from tantalum halide...

Plasma treatment at film layer to reduce sheet resistance...

Plasma treatment for copper oxide reduction