Self-aligned dual damascene etch using a polymer
Self-aligned dual thickness cobalt silicide layer formation proc
Self-aligned etch stop for polycrystalline silicon plugs on...
Self-aligned formation and method for semiconductors
Self-aligned fuse structure and method with dual-thickness...
Self-aligned mask to reduce cell layout area
Self-aligned metal caps for interlevel metal connections
Self-aligned metal nitride for copper passivation
Self-aligned metallurgy
Self-aligned metallurgy
Self-aligned method for forming a narrow via
Self-aligned silicide (salicide) process for strained...
Self-aligned silicide manufacturing method
Self-aligned silicide process
Self-aligned silicide process
Self-aligned silicide process for reduction of Si...
Self-aligned silicide process for silicon sidewall source...
Self-aligned silicide strap connection of polysilicon layers
Self-aligned silicide strap connection of polysilicon layers
Self-aligned source and drain extensions fabricated in a...