Thermal transfer printer for producing a photomask

Details Thermal transfer printer for producing a photomask Thermal transfer printer for producing a photomask

1988-08-08

1991-01-01

Dees, Jose

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Radiation mask

430300, 430302, 430309, G03F 100, G03F 700

Patent

active

049817655

ABSTRACT:
The invention relates to the use of a thermal transfer printer and of an ink ribbon containing a pigment or dye that absorbs light in the range from 350 to 450 nm for the direct production of a photomask from an electronically coded sources of information on a metal plate (PS plate) coated with a positively working photopolymer which is sensitive to light in the range from 350 to 450 nm, and, as surface layer, with a polymer which is soluble in alkaline solution and is permeable to light in the range from 350 to 450 nm, such that the image produced by the thermal transfer printer on the PS plate is used direct as photomask.

REFERENCES:
patent: 2146515 (1939-02-01), Schmidt
patent: 3697677 (1972-10-01), Newman
patent: 4200675 (1980-04-01), Flor et al.
patent: 4410562 (1983-10-01), Nemoto et al.
patent: 4429027 (1984-01-01), Chambers, Jr. et al.
patent: 4555471 (1985-11-01), Barzynski et al.
patent: 4568621 (1986-02-01), Aviram et al.
patent: 4695527 (1987-09-01), Geissler et al.
patent: 4853317 (1989-08-01), Hayes
Xerox Disclosure Journal., vol. 8, No. 2, Mar./Apr. 1985, p. 91.
Patent Abst. of Japan, vol. 5, No. 36 (p. 51) [708], Mar. 7, 1981.

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