Polymer, resist composition and patterning process
Polymer, resist composition and patterning process
Polymer, resist composition and patterning process
Polymer, resist composition, and patterning process
Polymer, resist material and patterning method
Polymer, resist material and patterning processing
Polymer, resist protective coating material, and patterning...
Polymer, resist protective coating material, and patterning...
Polymer, top coating layer, top coating composition and...
Polymer-bound sensitizer
Polymer-bound sensitizer
Polymer/oxime ester/coumarin compound photosensitive composition
Polymeric antireflective coatings deposited by plasma...
Polymeric binders for aqueous processable photopolymer compositi
Polymeric compound and resin composition for photoresist
Polymeric compound containing a repeated unit having a...
Polymeric compounds
Polymeric compounds, chemically amplified positive type resist m
Polymeric dyes for antireflective coatings
Polymeric dyes for antireflective coatings