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Polymer, resist composition and patterning process

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Polymer, resist composition and patterning process

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Polymer, resist composition and patterning process

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Polymer, resist composition, and patterning process

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Polymer, resist material and patterning method

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Polymer, resist material and patterning processing

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Polymer, resist protective coating material, and patterning...

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Polymer, resist protective coating material, and patterning...

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Polymer, top coating layer, top coating composition and...

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Polymer-bound sensitizer

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Polymer-bound sensitizer

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Polymer/oxime ester/coumarin compound photosensitive composition

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Polymeric antireflective coatings deposited by plasma...

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Polymeric binders for aqueous processable photopolymer compositi

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Polymeric compound and resin composition for photoresist

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Polymeric compound containing a repeated unit having a...

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Polymeric compounds

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Polymeric compounds, chemically amplified positive type resist m

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Polymeric dyes for antireflective coatings

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Polymeric dyes for antireflective coatings

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