Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Reexamination Certificate
2008-04-08
2008-04-08
Walke, Amanda (Department: 1795)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Radiation sensitive composition or product or process of making
C526S072000, C526S319000, C526S321000, C526S320000
Reexamination Certificate
active
11196450
ABSTRACT:
In an immersion lithography process, a pattern is formed by forming a photoresist layer on a wafer, forming a protective coating on the photoresist layer from an overlay material, exposing the layer structure to light in water, and developing. A water-insoluble, alkali-soluble material is used as the overlay material.
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Hatakeyama Jun
Kawai Yoshio
Komoriya Haruhiko
Maeda Kazuhiko
Ootani Michitaka
Birch & Stewart Kolasch & Birch, LLP
Central Glass Co. Ltd.
Shin-Etsu Chemical Co. , Ltd.
Walke Amanda
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