Polymer-bound sensitizer

Details Polymer-bound sensitizer Polymer-bound sensitizer

1996-06-28

2000-10-24

Chu, John S.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Radiation sensitive composition or product or process of making

430905, 430910, 430915, 430922, 430926, 430927, G03F 7004

Patent

active

061364983

ABSTRACT:
A photoresist composition for use in lithographic processes in the fabrication of semiconductor devices such as integrated circuit structures is disclosed. The photoresist composition includes a monomeric sensitizer bounding to a base-soluble long chain polymer.

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