Polymer/oxime ester/coumarin compound photosensitive composition

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making

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430281, 430284, 522 14, 522 16, 522 17, 522 18, 522137, 522142, 522162, G03F 7031

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active

050194828

ABSTRACT:
A photosensitive composition comprising:

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