Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Patent
1998-04-09
2000-04-18
Hamilton, Cynthia
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Radiation sensitive composition or product or process of making
430159, 430517, 5253274, 5253276, G03F 711
Patent
active
060513640
ABSTRACT:
A composition and methods for the use and manufacture thereof are provided for a polymeric dye. The composition comprises one or more aminoaromatic chromophores in conjunction with polymers having an anhydride group or the reaction products thereof. The composition is particularly useful as an underlaying antireflective coating with microlithographic photoresists for the absorbtion of near or deep ultraviolet radiation.
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Knors Christopher John
Macy Elwood Herbert
Moreau Wayne Martin
Capella Steven
Hamilton Cynthia
International Business Machines - Corporation
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