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Methods and compositions for reducing line wide roughness

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Methods for preparing photoresist compositions

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Methods for producing pattern-forming body

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Methods for producing polybenzoxazol precursors and correspondin

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Methods for the manufacture of cylindrical photosensitive resin

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Methods of fabricating an electronic device and an...

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Methods of forming a pattern of a semiconductor device

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Methods of forming patterned constructions, methods of...

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Microfabrication of organic optical elements

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Microlithographic resist containing poly(1,1-dialkylsilazane)

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Microlithographic structure with an underlayer film comprising a

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Microlithographic structure with an underlayer film containing a

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Mid and deep-UV antireflection coatings and methods for use ther

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Mid and deep-uv antireflection coatings and methods for use ther

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Mid and deep-UV antireflection coatings and methods for use ther

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Miniaturized microparticles

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Minimization of ablation in thermally imageable elements

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Mixture crosslinkable by photopolymerization

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Mixture which can be thermally hardened and hardened by...

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Mixture which is polymerizable by radiation, and radiation-sensi

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