Mixture which is polymerizable by radiation, and radiation-sensi

Details Mixture which is polymerizable by radiation, and radiation-sensi Mixture which is polymerizable by radiation, and radiation-sensi

1980-12-24

1982-03-30

Brammer, Jack P.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Radiation sensitive composition or product or process of making

20415915, 20415916, 20415922, 430281, 430287, 430288, 526306, 526315, 526316, 526321, 526322, G03C 168

Patent

active

043224911

ABSTRACT:
This invention relates to an improvement in a mixture which is polymerizable by radiation and contains, as the essential constituents, (a) a polymeric binder, (b) a polymerization initiator which can be activated by radiation, and (c) a compound of the formula I ##STR1## in which R.sub.1 is a divalent aliphatic group having 1 to 15 carbon atoms which also can be partially replaced by hetero-atoms, a divalent cycloaliphatic group having 3 to 15 carbon atoms, or a mixed aliphatic-aromatic group having 7 to 15 carbon atoms, and A is an electron-attracting radical. The invention also relates to a radiation-sensitive resist material using the improved radiation-polymerizable mixture.

REFERENCES:
patent: 2437421 (1948-03-01), D'Alelio
patent: 2445379 (1948-07-01), Young et al.
patent: 3748131 (1973-07-01), Reynolds et al.
patent: 4048035 (1977-09-01), Ide et al.
patent: 4225661 (1980-09-01), Muzyczko
patent: 4232106 (1980-11-01), Iwasaki et al.

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