Ultra-fine microfabrication method using a fast atomic energy be

Details Ultra-fine microfabrication method using a fast atomic energy be Ultra-fine microfabrication method using a fast atomic energy be

1997-06-06

1999-04-13

McPherson, John A.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making electrical device

430323, 430297, G03C 500

Patent

active

058940588

ABSTRACT:
An ultra-fine microfabrication method using an energy beam is based on the use of shielding provided by nanometer or micrometer sized micro-particles to produce a variety of three-dimensional fine structures which have not been possible by the traditional photolithographic technique which is basically designed to produce two-dimensional structures. When the basic technique of radiation of an energy beam and shielding is combined with a shield positioning technique using a magnetic, electrical field or laser beam, with or without the additional chemical effects provided by reactive gas particle beams or solutions, fine structures of very high aspect ratios can be produced with precision. The microfabrication method include radiating a Fast Atomic beam through a patterned photoresist Film to fabricate a pattern of 0.1 to 100 nm in a target object.

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Introduction to Microlithography, L.F. Thompson (ed.), ACS Symposium Series 219, Washington DC, 1983, pp. 2-7.
Fusao Shimokawa et al., "Reactive-fast-atom beam etching of GaAs using Cl.sub.2 gas", J. Appl. Phys. 66(6), Sep. 15, 1989, published by 1989 American Institute of Physics, 1989, pp. 2613-2618.
Tetsuro Nakamura et al., "Fabrication Technology of Integrated Circuit", published by Sangyo Tosho Publishing Company (Japan), 1987, pp. 21-23 (includes English translation).
Masayuki Nakao et al., "3-dimensional Handling in Nano Manufacturing World", Proceedings of 71st Fall annual meeting of the Japan Society of Mechanical Engineers, published by the Japan Society of Mechanical Engineers, 1993, vol. F, pp. 273-275 (includes English Abstract).
Masayuki Nakao et al., "Realization of 3-D Manufacturing in Nano Manufacturing World", Proceedings of 71st Spring annual meeting of the Japan Society of Mechanical Engineers, published by the Japan Society of Mechanical Engineers, 1993, vol. IV, pp. 485-486 (includes English Abstract).

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