Use of perfluoro-n-alkanes in vacuum ultraviolet applications

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device

Reexamination Certificate

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Reexamination Certificate

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07402377

ABSTRACT:
This invention concerns liquid perfluoro-n-alkanes for use in applications demanding high transparency at UV wavelengths ranging from about 150 to 165 nm, especially 157 nm. Uses include optical couplants, optical cements, optical elements, optical inspection media for semiconductor wafers and devices, and most especially immersion photolithography at 157 nm exposure wavelength.

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PCT/US2004/024761, International Search Report dated Jan. 19, 2005.

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