Polymer or resist pattern, and metal film pattern, metal...
Polymeric pyridinium ylides and products prepared from same
Polymeric self-assembled mono- and multilayers and their use in
Polymers and photoresist compositions
Polymers for anti-reflective coatings, anti-reflective...
Polymers having silicon-containing acetal or ketal...
Polymers, resist compositions and patterning process
Polyphosphazene binder resins for photoresists comprising as pho
Polysilane composition for forming a coating suitable for...
Positive and negative working radiation sensitive mixtures and p
Positive image-forming method using 4-methyl-1-pentene polymer
Positive photoresist composition and process for forming...
Positive photoresist composition containing photoacid generator
Positive photoresist containing a mixture of propylene glycol al
Positive photoresist processing with mid U-V range exposure
Positive photoresists employing an isomeric mixture of two hexah
Positive photosensitive composition and method of forming...
Positive resist composition and method of forming resist...
Positive resist composition suitable for lift-off technique and
Positive resist composition suitable for lift-off technique...