Polymers for anti-reflective coatings, anti-reflective...

Details Polymers for anti-reflective coatings, anti-reflective... Polymers for anti-reflective coatings, anti-reflective...

2007-08-24

2009-12-01

Hamilton, Cynthia (Department: 1795)

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Forming nonplanar surface

C430S271100, C430S313000, C430S317000, C525S328800

Reexamination Certificate

active

07625695

ABSTRACT:
An anti-reflective coating composition includes a solvent and about 20 to about 35 percent by weight of a polymer prepared by a condensation reaction of an acrylate polymer including a hydroxyl group with a derivative of muramic acid and a derivative of mandelic acid.

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patent: 2000-313779 (2000-11-01), None
patent: 10-0465866 (2004-12-01), None
patent: 10-0492796 (2005-05-01), None

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