Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface
Patent
1996-04-12
1999-03-23
Baxter, Janet
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Forming nonplanar surface
430323, 430324, 1562722, 1562755, 428420, G03C 500, B32B 3100, B32B 704
Patent
active
058857532
ABSTRACT:
A self-assembled multilayer and in particular polymeric self-assembled multilayer can be effectively produced from two or more self-assembled monolayers on a substrate where each of the self-assembled monolayers is produced for a block containing a first functional group and a second functional group where the second functional group is reacted with the first functional group. The production of polymerizable, self-assembled mono- and multi-layers from, e.g., blocks containing at least two acetylene groups and/or polymerizable end groups, is also provided. The polymerized mono- or multilayer can be employed in a variety of applications including photolithography.
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Chan Kwok-Chu
Crooks Richard M.
Kim Taisun
Schoer Jonathan K.
Ashton Rosemary
Baxter Janet
The Texas A&M University System
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