Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface
Patent
1997-11-04
2000-05-02
Baxter, Janet
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Forming nonplanar surface
430310, 430323, G03F 730
Patent
active
060570830
ABSTRACT:
The present invention provides novel polymers and chemically-amplified positive-acting photoresist compositions that contain such polymers as a resin binder component. Preferred polymers of the invention include one or more structural groups that are capable of reducing the temperature required for effective deprotection of acid-labile moieties of the polymer.
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Szmanda Charles R.
Taylor Gary N.
Baxter Janet
Corless Peter F.
Frickey Darryl P.
Lee Sin J.
Shipley Company L.L.C.
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