MEMS based charged particle deflector design

Method and apparatus for charged particle propagation

Method and apparatus for generating a membrane target for...

Method and apparatus for irradiating low-energy electrons

Method and apparatus for spot shaping and blanking a focused bea

Method and apparatus for wide angle beam scanning to internally

Method and apparatus involving the generation of X-rays

Method and apparatus producing plural images of different contra

Method and apparatus producing plural images of different contra

Method and circuit arrangement for improving the radiological de

Method and system for discharging a sample

Method and system for scanning a beam of charged particles to co

Method for centering a lens in a charged-particle system

Method for charging substrate to a potential

Method for surface treatment with extra-low-speed ion beam

Method for the determination of the electron density in a part v

Method of and apparatus for irradiating large surfaces with ions

Method of and device for adjusting a shaped-electron-beam workin

Method of and system for charged particle beam exposure

Method of controlling electrostatic lens and ion...