Method and system for discharging a sample

Details Method and system for discharging a sample Method and system for discharging a sample

2007-01-30

2007-01-30

Berman, Jack (Department: 2881)

Radiant energy

With charged particle beam deflection or focussing

With target means

C250S310000, C250S311000, C250S307000

Reexamination Certificate

active

11129463

ABSTRACT:
A method for discharging a sample, the method includes: determining whether to discharge a negatively charged area of a sample or to discharge a positively charged area of the sample; and injecting gas, via an electrode and gas supply component, or setting a first electrode to a first voltage and set the electrode and gas supply component to a second voltage, in response to the determination. A system including: a first electrode adapted to be set to at least a first potential; an electrode and gas supply component, adapted to be set to at least a second potential and to selectively supply gas to a vicinity of the sample; wherein at least one out of the first electrode and the electrode and gas supply component are positioned close to the sample.

REFERENCES:
patent: 5885354 (1999-03-01), Frosien et al.
patent: 6182605 (2001-02-01), Frosien
patent: 6555815 (2003-04-01), Feuerbaum et al.
patent: 2004/0169140 (2004-09-01), Schlichting

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