4. Radiant energy
  5. With charged particle beam deflection or focussing
  6. With target means
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High resolution matrix lens electron optical system

Radiant energy – With charged particle beam deflection or focussing – With target means
Patent

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High-power diagnostical X-ray equipment with thyristor converter

Radiant energy – With charged particle beam deflection or focussing – With target means
Patent

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High-throughput direct-write electron-beam exposure system and m

Radiant energy – With charged particle beam deflection or focussing – With target means
Patent

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