MEMS based charged particle deflector design

Details MEMS based charged particle deflector design MEMS based charged particle deflector design

2005-10-18

2005-10-18

Lee, John R. (Department: 2881)

Radiant energy

With charged particle beam deflection or focussing

With target means

C438S598000, C439S055000

Reexamination Certificate

active

06956219

ABSTRACT:
A microcolumn including a plurality of beam modification components coupled to an assembly substrate, wherein the plurality of beam modification components includes: (1) an extractor component; (2) a first focusing electrode component; (3) a first anode component; (4) a first deflector component; (5) a second focusing electrode component; (6) a second deflector component; (7) a third focusing electrode component; (8) a third deflector component; (9) a second anode component; (10) a fourth focusing electrode component; and (11) a third anode component. The beam modification components may be ordered on the substrate in this sequence or other sequences.

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