Method of and apparatus for irradiating large surfaces with ions

Details Method of and apparatus for irradiating large surfaces with ions Method of and apparatus for irradiating large surfaces with ions

1988-10-12

1990-04-17

Anderson, Bruce C.

Radiant energy

With charged particle beam deflection or focussing

With target means

250396R, 2504923, H01J 37147

Patent

active

049183168

ABSTRACT:
A target rotated about an axis is subjected to large surface irradiation by ons which spread in the direction of the target from a focus and in which peripheral ions are reflected inwardly, preferably by an array of electrode elements of alternatingly opposite polarity so that the reflecting electrostatic field is located only at the periphery of the beam and immediately adjacent the interior of the ion reflector.

REFERENCES:
patent: 3845312 (1974-10-01), Allison, Jr.
patent: 4002912 (1977-01-01), Johnson
patent: 4013891 (1977-03-01), Ko et al.
patent: 4128764 (1978-12-01), Luce
patent: 4224523 (1980-09-01), Crean
patent: 4321470 (1982-03-01), Kaplan et al.
patent: 4472636 (1984-09-01), Hahn
patent: 4494005 (1985-01-01), Shibata et al.
patent: 4633138 (1986-12-01), Tokiguchi et al.
patent: 4661712 (1987-04-01), Mobley

Affiliated with

Also associated with

Rating

Method of and apparatus for irradiating large surfaces with ions does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of and apparatus for irradiating large surfaces with ions, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of and apparatus for irradiating large surfaces with ions will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1054644