4. Radiant energy
  5. With charged particle beam deflection or focussing
  6. With target means
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Individually addressable cathodes with integrated focusing...

Radiant energy – With charged particle beam deflection or focussing – With target means
Reexamination Certificate

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Intense, energetic electron beam assisted X-ray generator

Radiant energy – With charged particle beam deflection or focussing – With target means
Patent

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Ion implanter

Radiant energy – With charged particle beam deflection or focussing – With target means
Reexamination Certificate

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Ion source with controlled superposition of electrostatic...

Radiant energy – With charged particle beam deflection or focussing – With target means
Reexamination Certificate

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Ion-beam etching method and an apparatus therefor

Radiant energy – With charged particle beam deflection or focussing – With target means
Patent

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Irradiation installation for ionizing radiation

Radiant energy – With charged particle beam deflection or focussing – With target means
Patent

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