Radiant energy – With charged particle beam deflection or focussing – With target means
Patent
1985-01-14
1987-01-06
Anderson, Bruce C.
Radiant energy
With charged particle beam deflection or focussing
With target means
2504922, H01J 314, H01J 326
Patent
active
046348719
ABSTRACT:
Charged particle source (14) delivers beam (20) which is collimated onto first aperture plate having first aperture (28). The beam passing therethrough is deflected by deflection plates (32, 34, 38 and 40) with respect to second aperture (46) in second aperture plate (44). The image (50) of the second aperture (46) is focused on the target plane (16) and the projected image of the footprint (58) of the deflected beam is focused on the target plane (16). When these images overlap, a shaped beam (56) passes through. Scanning of the beam across the target plane by deflection plates (52 and 54) permits exposure of sharp-edged features (62) by positioning the image (60a) inside the margin (64) and then scanning the image (50b) thereacross to expose the sharp edge and thereupon picking up the image (60) so that they both scan across the feature to be exposed.
REFERENCES:
patent: 4151422 (1979-04-01), Goto et al.
patent: 4182958 (1980-01-01), Goto et al.
patent: 4243866 (1981-01-01), Pfeiffer et al.
patent: 4393312 (1983-07-01), Collier et al.
Anderson Bruce C.
Denson-Low Wanda K.
Hughes Aircraft Company
Karambelas A. W.
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