Method and apparatus for irradiating low-energy electrons

Details Method and apparatus for irradiating low-energy electrons Method and apparatus for irradiating low-energy electrons

1991-07-26

1992-08-11

Anderson, Bruce C.

Radiant energy

With charged particle beam deflection or focussing

With target means

250251, 250427, H01J 3730, H01J 3708

Patent

active

051381699

ABSTRACT:
There is disclosed a method of irradiating low-energy electrons that has the steps of irradiating a primary electron beam from a primary electron beam irradiation portion onto a secondary electron emission portion to emit a secondary electron beam, accelerating the emitted secondary electron beam, removing high-energy components from that accelerated secondary beam, and decelerating the secondary electron beam without the high-energy components into a focus. And there is also disclosed an apparatus for irradiating low-energy electron that has a primary electron beam irradiating section, a secondary electron emitting section which receives the primary electron beam and emits a secondary electron beam, a secondary electron beam accelerating section, energy analyzing section which removes high-energy components from the accelerated secondary electron beam, to obtain low-energy secondary electrons, and deceleration section for decelerating the low-energy secondary electrons into a focus.

REFERENCES:
patent: 3660655 (1972-05-01), Wardell
patent: 4090076 (1978-05-01), Hunziker
patent: 4146787 (1979-03-01), Fite
patent: 4800281 (1989-01-01), Williamson
patent: 4902647 (1990-02-01), Chutjian et al.
patent: 4914292 (1990-04-01), Tamai et al.
patent: 4939360 (1990-07-01), Sakai

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