Energy filtered focused ion beam column
Energy regulator
Epi-illumination microscope and fluorescence filter set
Focusing apparatus for uniform application of charged particle b
Gantry system and method for operating same
Grid-cathode controlled X-ray tube
High resolution matrix lens electron optical system
High-power diagnostical X-ray equipment with thyristor converter
High-throughput direct-write electron-beam exposure system and m
Individually addressable cathodes with integrated focusing...
Intense, energetic electron beam assisted X-ray generator
Ion implanter
Ion source with controlled superposition of electrostatic...
Ion-beam etching method and an apparatus therefor
Irradiation installation for ionizing radiation
Lithography system and lithography method using the same
Low Aberration field emission electron gun
Magnetic separator for linear dispersion and method for...
Maskless micro-ion-beam reduction lithography system
Mass spectrometry with enhanced particle flux range