Radiant energy – With charged particle beam deflection or focussing – With target means
Patent
1976-10-13
1978-06-27
Dixon, Harold A.
Radiant energy
With charged particle beam deflection or focussing
With target means
250396R, 313431, G01K 108
Patent
active
040977455
ABSTRACT:
A high resolution matrix lens electron optical system utilizes a relatively short focal length matrix lens, means for providing an axial magnetic field and electrostatic deflection means for both coarse and fine deflection operation in conjunction with the axial magnetic field to provide reduced cathode loading and minimal spherical aberration.
REFERENCES:
patent: 3371206 (1968-02-01), Takizawa
patent: 3651303 (1972-03-01), Rehme
patent: 3876883 (1975-04-01), Broers
patent: 3936693 (1976-02-01), Parks et al.
Cohen Joseph T.
Dixon Harold A.
General Electric Company
Krauss Geoffrey H.
Snyder Marvin
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