Charged particle beam exposure system and method of compensating
Charged particle beam exposure system using line beams
Charged particle beam extraction system and method
Charged particle beam scanning apparatus
Charged particle exposure apparatus, and a charged particle expo
Charged-particle beam exposure device incorporating beam splitti
Charged-particle exposure apparatus
Charged-particle optical system
Charged-particle-beam microlithography apparatus and methods...
Charged-particle-beam projection optical system
Circuit arrangement for a detector for ionizing radiation
Circuit arrangement for an X-ray generator
Collective field accelerator
Collimator control and cassette position monitor for a diagnosti
Column for a charged particle beam device
Compact irradiation apparatus using a linear charged-particle ac
Compact microcolumn for automated assembly
Continuously rotating CAT scanning apparatus and method
Control circuit for a rotary-anode X-ray tube
Cooling of voice coil motors in lithographic projection...