Compact microcolumn for automated assembly

Details Compact microcolumn for automated assembly Compact microcolumn for automated assembly

2006-07-25

2006-07-25

Wells, Nikita (Department: 2881)

Radiant energy

With charged particle beam deflection or focussing

With target means

C438S598000, C439S055000

Reexamination Certificate

active

07081630

ABSTRACT:
A microcolumn including an assembly substrate and a plurality of beam modification components. The assembly substrate includes a plurality of sockets, and the beam modification components each include a connector coupled to a corresponding one of the sockets. Assembly of the beam modification components to the assembly substrate may employ automation and/or automated calibration, including automated motion of robotic stages in a substantially automated manner.

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