Charged particle beam scanning apparatus

Details Charged particle beam scanning apparatus Charged particle beam scanning apparatus

1977-11-21

1980-04-15

Anderson, Bruce C.

Radiant energy

With charged particle beam deflection or focussing

With target means

250398, 250396ML, H01J 3700

Patent

active

041985656

ABSTRACT:
A charged particle beam scanning apparatus includes a deflector for a beam of charged particles which includes a magnetic field generator to supply an incoming electron beam with a magnetic field whose intensity grows higher in the opposite direction to that in which the beam is deflected.

REFERENCES:
patent: 3287558 (1966-11-01), Bly et al.
patent: 3516037 (1970-06-01), Enge
patent: 3629578 (1971-12-01), LePoole
patent: 3867635 (1975-02-01), Brown et al.
Holiday et al. "Physics" John Wiley & Sons Inc., 1966 pp.816-817.

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