Device for influencing an electron beam

Details Device for influencing an electron beam Device for influencing an electron beam

2005-04-26

2005-04-26

Lee, John R. (Department: 2881)

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

C250S3960ML, C250S310000, C250S311000

Reexamination Certificate

active

06885009

ABSTRACT:
A device for influencing an electron beam, especially a deflector unit for an electron beam lithography machine, comprises a plurality of coil formers (12b) each with a bore (16) defining a passage for the beam and each carrying coils (18, 19) operable to generate magnetic fields for deflecting the path of the beam when passing through the passage. Each former is made of a high-strength ceramic material having a high thermal conductivity and low coefficient of thermal expansion so that, with respect to a given output of heat by the associated coils during quasi-continuous operation for repeated beam deflection during pattern writing, the heat is dissipated at such a rate as to preclude thermal expansion of the coils and thus avoid distortion of the magnetic fields generated by the coils.

REFERENCES:
patent: 5008549 (1991-04-01), Crewe
patent: 5136166 (1992-08-01), Young
patent: 5338939 (1994-08-01), Nishino et al.
patent: 5444256 (1995-08-01), Nagai et al.
patent: 6053241 (2000-04-01), Kendall
patent: 6657204 (2003-12-01), Buis et al.
patent: 2210738 (1990-08-01), None
patent: 5335219 (1993-12-01), None
patent: 2000048750 (2000-02-01), None

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