Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate
2007-10-02
2007-10-02
Kim, Robert (Department: 2881)
Radiant energy
With charged particle beam deflection or focussing
Magnetic lens
C250S398000, C250S492200
Reexamination Certificate
active
11196262
ABSTRACT:
A deflector which deflects a charged particle beam includes a substrate having an opening through which the charged particle beam should pass, and a deflection electrode which is arranged in the opening to deflect the charged particle beam and has a first conductive member and second conductive member which are formed by plating. The second conductive member is formed on a surface of the first conductive member and is essentially made of a material that is more difficult to oxidize than the first conductive member.
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Asano Kouji
Esashi Masayoshi
Hashimoto Shin'ichi
Iwasaki Yuichi
Moro Yoshiaki
Canon Kabushiki Kaisha
Fitzpatrick ,Cella, Harper & Scinto
Hitachi , Ltd.
Kim Robert
Smith II Johnnie L
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