Deflection system for a particle beam device

Details Deflection system for a particle beam device Deflection system for a particle beam device

2006-09-12

2006-09-12

Nguyen, Kiet Tuan (Department: 2881)

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

C250S310000, C250S398000

Reexamination Certificate

active

07105833

ABSTRACT:
A particle beam apparatus and a device for an energy corrected deflection by a predetermined deflection angle of a particle beam coming in along a beam axis are disclosed, whereby the particle beam consists of charged particles with energy values scattered around a predetermined energy value. The device comprises a corrector, whereby the corrector, by means of a first electric field and a superimposed first magnetic field, deflects the charged particles depending on their energies, and whereby the direction of the charged particles with the predetermined energy value is maintained during the passage through the corrector. The device further comprises a deflector applied after the corrector, whereby the deflector, by means of a second electric field or by means of a second magnetic field, deflects the charged particles with the predetermined energy vague by the predetermined deflection angle away from the beam axis, whereby the deflector focuses the charged particles. Further, the device comprises a controller to control the corrector and the deflector.

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