Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent
1990-01-12
1991-08-20
Anderson, Bruce C
Radiant energy
With charged particle beam deflection or focussing
Magnetic lens
250396R, H01J 37141, H01J 3712, H01J 37145
Patent
active
050417312
ABSTRACT:
A deflection compensating device for a converging lens includes a first electrostatic deflector by which a charged particle beam is deflected to a desired position by applying an electrical field to the charged particle beam. An electromagnetic type converging lens is where the charged particle beam is converged by applying a magnetic field to a beam deflected by the first electrostatic deflector. A second electrostatic is disposed in a magnetic field generated by the converging lens and generates an electrical field in a direction deviated by 90.degree. with respect to the direction of the electrical field generated by the first electrostatic deflector. The passage way of the charged particle beam which passes through the electromagnetic type converging lens substantially corresponds to the lens center axis of the electromagnetic type lens.
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patent: 4710639 (1987-12-01), Sawaragi et al.
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patent: 4859856 (1989-08-01), Groves et al.
Oae Yoshihisa
Yamada Akio
Anderson Bruce C
Fujitsu Limited
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