Deflector, method of manufacturing deflector, and charged...

Details Deflector, method of manufacturing deflector, and charged... Deflector, method of manufacturing deflector, and charged...

2006-09-19

2006-09-19

Wells, Nikita (Department: 2881)

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

C250S492220, C250S492200, C250S492230, C250S398000, C250S347000

Reexamination Certificate

active

07109494

ABSTRACT:
A deflector which makes multilayered wiring possible and prevents contamination during the manufacture includes an electrode substrate (400) having a plurality of through holes, and an electrode pair made up of first and second electrodes which oppose the side walls of each through hole in order to control the locus of a charged particle beam passing through the through hole, and a wiring substrate (500) having connection wiring pads connected to the electrode pairs of the electrode substrate to individually apply voltages to the electrode pairs. This deflector is formed by bonding the electrode substrate and wiring substrate via the connection wiring pads of the wiring substrate.

REFERENCES:
patent: 5162240 (1992-11-01), Saitou et al.
patent: 5260579 (1993-11-01), Yasuda et al.
patent: 6335127 (2002-01-01), Ono
patent: 6559463 (2003-05-01), Ono et al.
patent: 6603128 (2003-08-01), Maehara et al.
patent: 2001/0052576 (2001-12-01), Shimada et al.
patent: 2001/0054690 (2001-12-01), Shimada et al.
patent: 2002/0000766 (2002-01-01), Ono et al.
patent: 2002/0005491 (2002-01-01), Yagi et al.
patent: 2003/0209673 (2003-11-01), Ono et al.
Yasuda, Hiroshi.Applied Physics, 63, (1994). pp. 1135-1138.

Affiliated with

Also associated with

Rating

Deflector, method of manufacturing deflector, and charged... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Deflector, method of manufacturing deflector, and charged..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Deflector, method of manufacturing deflector, and charged... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3555416