Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent
1983-05-31
1985-03-26
Anderson, Bruce C.
Radiant energy
With charged particle beam deflection or focussing
Magnetic lens
G21K 108, H01J 314
Patent
active
045075590
ABSTRACT:
A deflection structure for a corpuscular beam blanking system has two deflection electrodes, a first of which is supplied with a chronologically varying potential, the second of which being connected to a chronologically constant potential for generating standard corpuscular beam pulses. The structure further includes auxiliary electrodes disposed in front of and behind the deflection electrodes in the direction of beam travel for reducing the energy spread of the corpuscular beam, the auxiliary electrodes being supplied with a static voltage.
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"A Modified Cylindrical Condenser As Electrostatic Prism", Liebl, Int. Jour. of Mass Spectrometry and Ion Physics, 22, (1976), pp. 203-207.
"Beam Chopper for Subnanosecond Pulses in Scanning Electron Microscopy", H. P. Feuerbaum et al., J. Phys. E.: Sci. Instrum., vol. 11, 1978, pp. 529-532.
Anderson Bruce C.
Siemens Aktiengesellschaft
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