Deflection system

Details Deflection system Deflection system

1997-06-16

1998-12-08

Berman, Jack I.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

H01J 3709, H01J 37147

Patent

active

058473998

ABSTRACT:
A deflection system (6) for a charged particle beam (2), in particular for rrangement in an objective lens for a charged particle beam device with a deflection means (60) for generating a magnetic field acting on the charged particle beam (2) and a shield (61) for avoiding eddy currents, which surrounds the deflection means and guides the formed outer magnetic field. The shield (61) consists, transversely to the direction of the charged particle beam (2), of at least one soft magnetic layer which is preferably formed as a strip material and rolled up to a cylinder together with an electrically insulating layer.

REFERENCES:
patent: 3984687 (1976-10-01), Loeffler et al.
patent: 4701623 (1987-10-01), Beasley
patent: 4798953 (1989-01-01), De Chambost

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