Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate
2006-09-01
2010-12-07
Souw, Bernard E (Department: 2881)
Radiant energy
With charged particle beam deflection or focussing
Magnetic lens
C250S3960ML, C250S310000, C250S492220, C250S492300, C250S503100
Reexamination Certificate
active
07847266
ABSTRACT:
A charged particle beam apparatus and a method for measuring an emission pattern of such an apparatus are provided. The apparatus comprises an emitter with an emission pattern including at least two emission peaks, a gun lens, and a diaphragm, wherein the gun lens comprises a deflector unit and the deflector unit is adapted to direct an emission peak of the at least two emission peaks to an opening of the diaphragm to thereby select the emission peak of the at least two emission peaks from the emission pattern.
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Frosien Jürgen
Zhou Fang
ICT Integrated Circuit Testing Gesellschaft für Halbleiterp
Logie Michael J
Patterson & Sheridan LLP
Souw Bernard E
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