Charged-particle beam system
Charged-particle beam system
Charged-particle-beam optical system
Charged-particle-beam projection apparatus and transfer methods
Charged-particle-beam projection-lens system exhibiting...
Chromatic aberration corrector for charged particles and...
Chromatically compensated particle-beam column
Chromatically corrected deflecting device for particle-beam equi
Circuit for image displacement in a particle beam apparatus inde
Circular, confined distribution for charged particle beams
Column simultaneously focusing a partilce beam and an...
Combined electrostatic objective and emission lens
Compaction managed mirror bend achromat
Compensated magnetic deflection coil for electron beam lithograp
Compensation of space charge in a particle beam system
Components for reducing background noise in a mass spectrometer
Composite concentric-gap magnetic lens
Composite concentric-gap magnetic lens and deflector with conica
Composite electromagnetic lens with variable focal distance
Composite multipurpose multipole electrostatic optical structure